· Ultra High Reliability
· Small Footprint
· One or Two Spin Modules
· Color LCD Touchscreen
· Unlimited Process Storage Capabilities
· Remote Data Collection and Control
· Stacked Thermal Modules
· Multiple Size Substrates without Change
· Servo Motion Control
· Process Substrates up to 300 mm
· Proven Modular Design
· Lowest Cost of Ownership
Back Side Reticle Cleaner
The PRC 6625 (patent pending) provides a means of cleaning the back side of a Pellicilized Reticle without
affecting nor even touching the Pellicilized side of the reticle.
The specially designed handling means coupled with an innovative capture chuck enables the cleaning of the back
to remove unwanted haze and particles. The tool typically handles the reticles from a SMIF pod and returns the
cleaned reticle to the SMIF pod.
The use of the S-Cubed PRC 6625 will substantially reduce reticle set costs by providing means for a fab to clean
their reticles without having to resort to sending the reticles out for pellicle demount, clean and remount.