MPI MicroPositioners
       
CWI Technical Sales    Phone: 732-536-3964    Fax: 732-536-0495   

DC Probing
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TS50
50mm Manual Probe Station
System Highlights:

    Designed for Single Die and Small Substrates
    No compromise on functionality and measurement
    XY-Theta Stage with Fine micrometer positioning
    Rigid Microscope Bridge
    25mm Z drive platen for accurate probe placement
    Can support up to 2 RF or 6 DC Positioners
    Vacuum controls for chuck and auxiliary chuck
    Thermal Chuck available as option
    Stereo microscope or Single tube optics available
    Ultra small footprint

TS150
150mm Manual Probe Station
System Highlights:

    Designed for Device Characterization, WLR, IC Engineering, MEMS, HF Modeling, FA and High Power
    One handed puck control stage movement for fast positioning and 25mm x 25mm micrometer stage
    Highly reliable platen lift design with three discrete positions; 1µm repeatability
    Rigid Microscope Bridge
    25mm Z drive platen for accurate probe placement
    Can support up to 4 RF or 10 DC Positioners
    Vacuum controls for chuck, auxiliary chucks and Air Bearing Microscope stage
    Thermal Chuck, Probe Card Holder available as options
    High Power Microscope or Single tube optics available

TS200
200mm Manual Probe Station
System Highlights:

    Designed for IC Design, Design Validation and FA
    One handed puck control stage movement for fast positioning and micrometer stage
    Highly reliable platen lift design with three discrete positions; 1µm repeatability
    20mm Probe Platen adjustment
    Rigid Microscope Bridge
    Can support up to 4 RF or 10 DC Positioners
    Thermal Chuck, Probe Card Holder available as options
    High Power Microscope or Single tube optics available
TS200-SE
200mm Manual Probe Station with ShieldEnvironment
System Highlights:

    Designed for Device Characterization, Design Validation
    EMI and Light ShieldEnvironment for low noise measurement
    One handed puck control stage movement for fast positioning and micrometer stage
    Highly reliable platen lift design with three discrete positions; 1µm repeatability
    Rigid Microscope Bridge
    25mm chuck Z loading stroke
    Can support up to 4 RF and 2 DC or 8 DC Positioners
    Thermal Chuck, Probe Card Holder available as options
Johnstech WLCSP Probe Card
TS300
300mm Manual Probe Station
System Highlights:

    Designed for IC Design, Design Validation and FA
    One handed puck control stage movement for fast positioning and micrometer stage
    Highly reliable platen lift design with three discrete positions; 1µm repeatability
    20mm Probe Platen adjustment
    Rigid Microscope Bridge
    Can support up to 4 RF or 10 DC Positioners
    Thermal Chuck, Probe Card Holder available as options
    High Power Microscope or Single tube optics available
TS2000
200mm Automated Probe Station
System Highlights:

    Designed for wide variety of On-Waffer Production DC-IV / DC-CV / Pulsed-IV / High Power Applications
    RF Applications up to 67 GHz / High Power Production Application up to 10kV / 400A
    Can supports up to 4 RF and 8 DC MicroPositioners or Standard 4.5" Probe Card Holder
    Various non-thermal or thermal chucks (Triaxial or Coaxial) Range from -60C up to 300C
    Software Suite SENTIO® - revolutionary multitouch control (mimics modern smart mobile devices)
    Integrated High Performance Vibration Isolation Table
    Dark Box Option Available
TS2000-SE
200mm Automated Probe Station with ShieldEnvironment
System Highlights:

    Designed for wide variety of On-Waffer Measurement; DC-IV / DC-CV / Pulsed-IV / WLR / FA & High Power
    RF Applications from 26GHz to 110GHz & Beyond / High Power Production Application up to 10kV / 400A
    Can supports up to 4 RF and 8 DC MicroPositioners or Standard 4.5" Probe Card Holder
    MPI ShieldEnvironment™ Designed for Advance EMI / RFI / Light-Tight Shielding (fA Low-Leakage Capability)
    Various non-thermal or thermal chucks (Triaxial or Coaxial) Range from -60C up to 300C
    Automated Single Wafer Loader
    Software Suite SENTIO® - revolutionary multitouch control (mimics modern smart mobile devices)
    Integrated High Performance Vibration Isolation Table