Failure Analysis - Defect Review
Related Products
The MicroINSPECT 300 FA is a multipurpose
semiconductor wafer defect review and failure
analysis inspection tool that recognizes wafers
up to 300 mm. Open FOUP, FOSB, crystal Pak
and 300mm cassettes with one tool!
MicroINSPECT 300 FA is also a complete wafer
sorter. Supplied Integrated with any major
microscope brand -- or your existing
microscopes. Image storage and retrieval. Run
second optical inspections with ease. Includes
complete failure analysis navigation software and
imaging database.
MicroINSPECT 300FA Semiconductor Wafer Inspection Failure Analysis Tool
MicroINSPECT 300FA is fully integrated with SiteVIEW Software which gives you the power to
act fast, be flexible, and solve critical issues before it’s too late.

SiteVIEW Software Applications Includes:
·   Failure Analysis Navigation Programs
·   User Customizable Screens
·   Automated “manual load” mode for single wafer or wafer piece loading with Deskew
·   Defect Review & Inspection- visit defect sites using defect review file data
·   Complete Wafer Sorter
·   Second Optical Inspection
·   Image Storage, Retrieval and Database
·   GEM/SECS II
·   Host Communication - LANs,
·   All Major Microscope Interface (Zeiss, Nikon, Leica, others)
MicroINSPECT 300FA Custom Configurations:
·   One Bridge Tool for Both 200 & 300mm semiconductor wafers. Automatic wafer size recognition. No calibration needed.
·   1 or 2 Cassette Platforms for manual loading in Failure Analysis Lab
·   FOUP indexers available
·   OCR - Dual wafer ID recognition Alpha-numeric for 200mm and 2D Matrix for 300mm
·   Photonic Laser Marker Compatible
·   Zeiss Optics - BF, DF, DIC, VIS & UV Confocal modes with 80-100nm visibility
·   Can integrate with all major microscope brands including existing microscopes
·   Hi-Precision Stage with embedded 12" x 12" reticle for maximum accuracy
·   Hi Res Flat Panel Display
MicroINSPECT 300FA Semiconductor Wafer Defect Inspection Platform Equipment Features:
·   Active Mini Environment, Passive Enclosure or open Table Top Workstation
·   Small Footprint
·   Mounted on Casters and Extendable Leveling Posts for Mobility
·   Vacuum 25 inches Hg
·   No process air or N2 Required
·   Configurable for Fabs or Failure Analysis Labs
·   End-User Customizable Enclosures and Layouts
·   Field Serviceable Robot & Peripherals
Wafer Defect Review, Inspection and Sorter - All In One Integrated Tool
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CWI Technical Sales  ·  Phone: 732-536-3964  ·  Fax: 732-536-0495  · 

MPI TS150 Probe Station