LED, PSS & PEC analysis
Auto Height, Diameter & Pitch for PSS
Analyze photo-resist or post-etch PSS bumps
Auto feature, roughness detection
Post-epi mesa analysis
2”, 4” & 6” wafer vacuum chucks
Solar cell and wafer analysis
Auto Finger Height, Width & Volume
Poly-Si and Mono-Si Surface Area & Texture
Silicon-NItride AR Film Thickness
Multi-site and auto finger detect
156mm solar wafer vacuum chuck
Micro-fluidics and MEMS analysis
Transparent multi-surface profiling
Deep trench/well & high aspect ratio features
Programmable cursors and cross-sections
Multi-site sequences imaging
Multi-FOV 3D image stitching
Auto Slope & waviness compensation
Auto Surface leveling
Auto Feature height, dimensions, angle, area
Auto Linear and areal roughness
Patented Z-Dot Focus Map Technology
Zeta's patented Z-DotTM technology enables researchers and production managers to create true-color, 3D images of sub-micron surface features for measurement applications in High-Brightness LEDs, Solar Cells, Biotech, and Magnetic Storage Media. The Z-Dots enable the system software to rapidly identify features within the plane of focus to create accurate 3D surface maps of Patterned Sapphire Substrates, Surface Textures, Microfluidic Channels, and Micro-machining defects.
Zeta-20 True Color 3D Optical Profiler
The Zeta-20TM is a fully-integrated optical profilometer that provides advanced 3D imaging and metrology features in a flexible, cost-effective package. Zeta's proprietary Z-DotTM technology enables rapid surface measurement of PSS, Solar Cells, Fluid Microchannels, and other surfaces that more costly systems cannot easily handle.
Zeta-300 Precision Surface Metrology
The Zeta-300 provides integral acoustic isolation to reduce the effects of sound and air currents on sample measurements. When gathering data on structures that are less than 1µm high, even small vibrations caused by sound and air disturbances can affect your results. Coupled with an optional isolation table, the Zeta-300 delivers accuracy and repeatability unmatched by other optical profilers.
ZetaScan-Series Automated Substrate Defect Inspection
The ZetaScan-Series are fully automated 300mm capable defect inspection tool that can address a variety of substrates such as rough ground substrates, polished and unpolished, opaque and transparent wafers as well as touch panels. Based on Zeta’s revolutionary multi-mode approach to inspection, the ZetaScan-series defect inspectors provide high defect sensitivity at high throughput.