Rapid Thermal Processing
S-Cubed Photoresist
Spin Processing Systems
Camtek Gannet
Automated Optical
Inspection System
OAI AML
Wafer Bonder
Related Products
TYPICAL APPLICATIONS:

     Ion Implant Activation
     Polysilicon Annealing
     Oxide Reflow
     Silicide Formation
     Contact Alloying
     Oxidation and Nitridation
     GaAs Processing
     Other Heat Treatment Process
Allwin21 Corp. professionally provides the following high-tech
equipment with high Quality, right Cost, quick Delivery, and
excelent Service for Semiconductor industry, MEMS,
Biomedical, Nanotechnology, Solar, LEDs, etc. Located in
Santa Clara, the heart of Silicon Valley, Allwin21 has been
providing unique technical support, high quality equipment and
fast supplied spare parts worldwide.
Atmosphere Rapid Thermal Process
AccuThermo AW 410:
Manual Desktop System
Basic Features:

     2 to 4 inch wafer size
     100-800 C
     10-100 C/S ramp rate
     10-100 C/S cooling rate
     30 Mins@600C; 20 Mins@700C; 5 Mins@1000C
     1 gas line with 10 SLM MFC
     3 phase, 50/60Hz, 200/208/380/420 VAC Power
Options:
     100-1250 C with Thermocouple & Patented ERP Pyrometer
     2 - 4 or 5 - 6 gas lines with MFCs
The AccuThermo atmosphere rapid thermal processing (RTP) systems use high intensity visible radiation to heat single wafers for short process periods of time at precisely controlled temperatures.
AccuThermo AW 610:
Manual Desktop System
Basic Features:

     2 to 4 or 4 to 6 inch wafer size
     100-800 C
     10-200 C/S ramp rate
     10-150 C/S cooling rate
     60 Mins@600C; 30 Mins@700C; 5 Mins@1000C
     1 gas line with 10 SLM MFC
     3 phase, 50/60Hz, 200/208/380/420 VAC Power
Options:
     100-1250 C with Thermocouple & Patented ERP Pyrometer
     2 - 4 or 5 - 6 gas lines with MFCs
AccuThermo AW 810:
Manual Desktop System
Basic Features:

     4 to 6 or 5 to 8 inch wafer size
     100-800 C
     10-200 C/S ramp rate
     10-150 C/S cooling rate
     60 Mins@600C; 40 Mins@900C; 10 Mins@1000C
     2 gas lines with 10 SLM MFCs
     3 phase, 50/60Hz, 200/208/380/420 VAC Power
Options:
     100-1250 C with Thermocouple & Patented ERP Pyrometer
     3 to 4 gas lines with MFCs
     Isolated Quartz Tube for Clean Environment
     Top and Bottom Tungsten Halogen Lamps
     Aluminum Chamber with Water Cooling and Gold Plating
AccuThermo AW 820:
Manual Stand Alone Systems
Basic Features:

     4 to 6 or 5 to 8 inch wafer size
     100-800 C
     10-200 C/S ramp rate
     10-150 C/S cooling rate
     120 Mins@600C;
       90 Mins@900C;
       60 Mins@1000C
     2 gas lines with 10 SLM MFCs
     3 phase, 50/60Hz, 200/208/380/420 VAC Power
Options:
     100-1250 C with Thermocouple & Patented ERP Pyrometer
     3 to 4 gas lines with MFCs
Vacuum Rapid Thermal Process
AccuThermo AW 610V:
Manual Desktop System
Basic Features:

     Baratron Gauge to read the pressure
     Top Tungsten Halogen Lamps
     2 to 4 or 4 to 6 inch wafer size
     100-800 C with Thermocouple Sensor
     10-80 C/S ramp rate
     10-80 C/S cooling rate
     20 Mins@600C; 10 Mins@800C; 2 Mins@1000C
     2 gas line with 10 SLM MFCs
     3 phase, 50/60Hz, 200/208/380/420 VAC Power
Options:
     100-1000 C with Thermocouple & Patented ERP Pyrometer
     3 - 4 gas lines with MFCs
     Vacuum pumps
     Throttle valve to control the pressure
     Atmospheric process function
The AccuThermo vacuum rapid thermal processing (RTP) systems use high intensity visible radiation to heat single wafers for short process periods of time at precisely controlled temperatures and vacuum.
     Metal Vacuum Chamber with Cooling Water
     Quartz Windows with Tungsten Halogen Lamps
     50 - 100 mTorr Base Vacuum Pressure
AccuThermo AW 820V:
Manual Stand Alone Systems
Basic Features:

     Baratron Gauge to read the pressure
     Throttle valve to control the pressure
     Top & Bottom Tungsten Halogen Lamps
     4 to 6 or 5 to 8 inch wafer size
     100-900 C with Thermocouple Sensor
     10-80 C/S ramp rate
     10-80 C/S cooling rate
     60 Mins@600C; 30 Mins@800C; 10 Mins@1000C
     2 gas line with 10 SLM MFCs
     3 phase, 50/60Hz, 200/208/380/420 VAC Power
Options:
     3 - 4 gas lines with MFCs
     Vacuum pumps
     Atmospheric process function
       
CWI Technical Sales    Phone: 732-536-3964    Fax: 732-536-0495