Thermal Test
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ThermoChuck Systems
Perform wafer probing, testing and failure analysis from -65 to +400C. Test wafers up to
300mm diameter at precise temperature at the wafer probing station. For the testing, cycling
and characterization of wafers and other flat devices at precise temperature.
TPO3000:
Thermal Inducing Vacuum Platform
Chuck Diameters: 6 inch (154 mm) or 8 inch (203 mm) diameters

Chuck Surfaces: Choice of gold- or nickel-plated surfaces are standard
Outstanding Features:

    Wide temperature range: -65C to +200C in a self-contained system.
    No Liquid Nitrogen or CO2 required for cooling
    DC Control System minimizes electrical noise
    Temperature Accuracy: 0.5C (calibrated against transfer standard)
    Temperature Stability: 0.1C
    Advanced ThermoChuck Design:
    Low stray capacitance and high electrical resistance to ground:
       Surface Electrical Isolation: >109ohms at 500 VDC between surface and ground at +25C
       Higher isolation configurations are available
    Superior chuck temperature uniformity: 0.5C or 0.5% of set temperature
    Guarded ( low leakage) chuck configurations are optional
TPO3010:
Thermal Inducing Vacuum Platform
Chuck Diameters: 6 inch (154 mm) or 8 inch (203 mm) diameters

Chuck Surfaces: Choice of gold-plated or nickel-plated surfaces are standard
Outstanding Features:

   Wide Temperature range: 0 to +200C
   DC Control System minimizes electrical noise
   Temperature Stability :0.1C
   Temperature Accuracy: 0.5C calibrated against transfer standard
   Advanced ThermoChuck Design:
             Low stray capacitance and high electrical resistance to ground:
                 Surface Electrical Isolation: >109 ohms at 500 VDC between surface and ground at +25C
                 Higher isolation configurations are available
             Superior chuck temperature uniformity: 0.5C or 0.5% of set temperature
             Guarded (low leakage) chuck configurations are optional

System Type           Temperature Range
    TP03010A                +20C to +200C
    TP03010B                    0C to +200C
TPO3015:
Thermal Inducing Vacuum Platform
System Type           Temperature Range          Extended Range
   TP0315A                   +30C to +200C             +30C to +300C               
   TP0315B                       0C to +200 C                0C to +300C               
Chuck Diameters: 5 inch (127 mm), 6 inch (154 mm) or 8 inch (203 mm) diameters

Chuck Surfaces: Choice of gold-plated or nickel-plated surfaces are standard
Outstanding Features:

   Excellent Temperature Uniformity ( 0.5C or 0.5% ) over entire temperature range
   Temperature Accuracy: 0.3C when calibrated against primary or transfer std.
   Excellent Temperature Stability ( 0.1C) and Control
   Good Electrical Isolation: 1 gig-ohm @ 500 VDC between surface and ground
   Low Noise DC Control system
   Excellent System and Chuck Reliability
   Extended Programming Option: Set ramp rate, soak time and number of cycles for temperature cycling
TPO315
ThermoChuck
           
CWI Technical Sales    Phone: 732-536-3964    Fax: 732-536-0495   

MPI TS150 Probe Station