Front End > Wet Process
Fully-Automated Wet Bench
Semi-Automated Wet Benches
Model WPS-1000-FA-A-2002-3001
Semiconductor Wet Bench Front and Rear Access Batch Chemical Process System
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Incorporates Linear Servo Positioning Systems for two process vessel configuration or multiple process vessel configurations
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Designed to accommodate dual 100 MM, 150 MM, 200 MM and single 300MM wafer cassette handling to provide broader process capabilities
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The positioning system movement is performed by an independent numerical controller and incorporates interpolated movement for reduced transfer times and smoother movements
Model WPS-700-RA-A-150-200-1
Rear Access Semiconductor Wet Bench 150 MM Batch Chemical Process System
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Incorporates Linear Servo Positioning Systems for two process vessel front to rear configurations which use independent PLC controllers for each process module
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All modules operated independently of each other and are provided with a UPS for additional product safety in the event of power outages
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Operator interface is via a Colored Touch Screen located on front control panel
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PLC based controllers permit both manual and automated operation of the Servo Positioning System
Model WPS-600-PVC-C, Y/Z/ Theta Series
Semiconductor Wet Bench Front and Rear Access Batch Chemical Process System
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Incorporates Linear Servo Positioning Systems with a Rotary Theta Axis for multiple process vessel configurations
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Designed to accommodate single 75 mm, 100 mm and 150 mm wafer cassette handling to provide broader process capabilities
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Theta axis allows for front and rear process vessel configuration
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Positioning system movement is performed by independent numerical controller and incorporates interpolated movement for reduced transfer times and smoother movements
Model WPS-400PVC-C, Y/Z Series
Semiconductor Wet Bench Front and Rear Access Batch Chemical Process System
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Incorporates Linear Servo Positioning Systems for two process vessel configuration or multiple process vessel configurations
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Designed to accommodate single 75 mm, 100 mm and 150 mm wafer cassette handling to provide broader process capabilities
Model WPS-800-FA-A-2001-3001
Semiconductor Wet Bench Front Access Batch Chemical Process System
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Incorporates Linear Pneumatic Positioning Systems for two process vessel configuration
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Designed to accommodate single 200 MM and 300MM wafer cassette to provide broader process capabilities
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Positioning system movement is performed by pneumatic linear actuators with flow precision controls for smoother movements that are protected by Gortex Bellows
Model WPS-900-FA-A-2002-3001
Semiconductor Wet Bench Front Access Batch Chemical Process System
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Incorporates Rotary Servo or Pneumatic Positioning Systems for two process vessel configuration or multiple process vessel configurations
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Designed to accommodate dual 100 MM, 150 MM, 200 MM and single 300MM wafer cassette handling to provide broader process capabilities
Manual Wet Benches
Acid-Base Wet Benches
Model WPS-VLF-800-FA-FM-PVC-C
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Factory mutual approved noveon PVC-C vertical laminar
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All processed in class 10 environments
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Flow front access wet process system designed to process Si and GaAs wafers
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Constructed out of FM approved CPVC, PVC-C, (PVDF) Kynar or (ECTFE) Halar construction, allowing corosion resistance to acids and bases
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Built with modular recess deck with 360° process vessel lip exhaust and secondary exhaust
Solvent Wet Benches
Model WPS-800-VLF-FM-SS
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Designed to process Si and GaAs wafers in a class 10 environment
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Constructed out of FM Approved Stainless Steel for resistance to all solvent processes and fire
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Safety and ergonomics are main aspects in the system design
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Designed to be installed through the wall with the control panel flush to the wall
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All DI Water fluid components are accessible through removable front and/or rear access panels
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All electrical components are accessible through removable front and/or rear access panels and incorporate interlock switches with EPO interface via keyed By-Pass switch for safety
Chemical Blend Dispense Systems
Overview
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Wafer Process Systems Inc. manufactures world class wet process equipment using precision fluid controls and components for all wet process applications
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Applications include bulk chemical, delivery, point of use chemical recirculation and filtration, point of use chemical metering, and chemical waste recovery
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All chemical wetted components are PVDF, PTFE Teflon, PFA Teflon or Quartz
Bulk Chemical Handling & Fluid Control
Point of Use Chemical Filtration & Fluid Control