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University Probe Stations - IMPACT

ITS25-THZ
25mm System for mmW & THz
01.1 ITS25-THZ_front view.png

  • Ceramic chuck with vacuum - 1x1mm sample

  • +/- 5 degree fine theta rotation

  • 2x MP80 mmW positioners with Frequency  Extender Integration Platforms

  • SuperZoom Microscope with Camera, Monitor

ITS50-RF26
50mm System - RF
IMPACT_ITS50-RF26_web_edited.jpg

  • 50mm non-thermal triaxial chuck

  • 100x75mm XY with 25x25mm fine control

  • +/-5 degree fine theta rotation

  • 2x MP40 RF with 2x T26 TITAN Probes, Cal Substrate, Cleaning Pad and Torque Wrench

  • Stereo Microscope
     

ITS50-COAX
ITS50-COAX.png

  • 50mm non-thermal triaxial chuck

  • 100x75mm XY with 25x25mm fine control

  • +/-5 degree fine theta rotation

  • 4x MP25, Coax Probe Arms, 2m Coax BNC Cables

  • Stereo Microscope

50mm System - DC/CV
ITS50-TRIAX
ITS50-COAX.png

  • 50mm non-thermal triaxial chuck

  • 100x75mm XY with 25x25mm fine control

  • +/-5 degree fine theta rotation

  • 4x MP25, Triax Probe Arms, 2m Triax Cables

  • Stereo Microscope

50mm System - DC/CV
ITS150-COAX
ITS150 Coax.png

  • 150mm non-thermal triaxial chuck

  • 180x230mm XY with 25x25mm fine control

  • +/-5 degree fine theta rotation

  • 4x MP25, Coax Probe Arms, 2m Coax BNC Cables

  • Stereo Microscope

150mm System - DC/CV
ITS150-TRIAX
ITS150 Coax.png

  • 150mm non-thermal triaxial chuck

  • 180x230mm XY with 25x25mm fine control

  • +/-5 degree fine theta rotation

  • 4x MP25, Triax Probe Arms, 2m Triax  Cables

  • Stereo Microscope

150mm System - DC/CV
High Power up to 10kV, 600A
ITS150-RF26
ITS150 RF26.png

  • 150mm non-thermal triaxial chuck

  • 180x230mm XY with 25x25mm fine control

  • +/-5 degree fine theta rotation

  • 2x MP40 RF with 2x T26 TITAN Probes, Cal Substrate, Cleaning Pad and Torque Wrench

  • Stereo Microscope

150mm System - RF
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